The is an Error. The Data displayed below is not necessarily current/correct
Remaining Run Time
Remaining Segment Time
0 min
0:0:00.00
-1 °C
-1 °C
0.0000 sccm
0 sccm
0.0000 sccm
0 sccm
0.0000 sccm
0 sccm
0.0000 sccm
0 sccm
0.0000 sccm
0 sccm
0.0000 sccm
0 sccm
0.0000 sccm
0 sccm
0.0000 sccm
0 sccm
0.0000 sccm
0 sccm
0.0000 sccm
0 sccm
0.0000 sccm
0 sccm
Pressure
0 torr
Pressure Set Point
0 torr